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| GALVANOMETER
SYSTEM
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MicroPoint
Laser with Galvanometer System for Defect Classification, Deprocessing
and Navigation in IC's, LCD's, OLED's, Hard Disk and Disk Media
The MicroPoint
Laser Galvanometer System allows a near diffraction limited laser
spot to be manually or automatically positioned within the field
of view.
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Controls are
provided for selecting one of four patterns - circles, square, triangle,
crossline - or a single dot. Each pattern can be varied from a single
point to about 70% of the field of view.
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| The
above images show examples of the pattern generation capabilities.
On the left are examples of each of the four available preprogrammed
patterns at a uniform size, on a lubricated disk media surface.
Note how the metal media is actually not affected and only the
lubrication layer has been marked by the laser. To the right
is a raw silicon wafer surface, marked with a variety of patterns
at different sizes. |
The size range
for any given pattern on a standard microscope varies from several
microns to 5 millimeters.
A single point,
or a series of points, may be fired at a set frequency and can be
interactively steered to make fine cuts without the need for expensive
motorized microscope stages.
Laser
power can be adjusted in fine increments from the control panel
allowing precise and reproducible tuning of laser output to the
sample.
Features
- Unimpaired
use with most microscopes -
- 57KB
- Real time
laser / eyepiece observation
- Interlocked
installation meets applicable safety specifications
- Fiber optic
delivery system provides flexible system footprint and ensures
safe operation
- Galvanometer
steering system provides fast and easy manual beam positioning
or automatic pattern generation for defect classification and
navigation
- Stepper
motor controlled attenuator provides reproducible fine incremental
control of power. This allows the user to match laser output to
the sample and task at hand.
Applications
*Note:
Applications of the MicroPoint laser with Galvanometer system include
all the applications of the manual system above, plus the following
applications:
Performance
- Energy up
to 50 micro Joules
- Pulse length
2-6 nano seconds
- Near diffraction
limited spot size
- Tunable
from 365-900nm
- Reusable
dye cell provides 100,000 pulses from 5ml disposable dye
- Nitrogen
laser provides 20,000,000 pulses from a replaceable plasma cartridge
- Pattern
generation with shapes between 5 microns and 5 mm and with the
discreet points in the pattern between .25 and 5 microns.
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